Abstract --- This paper presents a high ESD performance NPN protection structure for advanced submicron BiCMOS and Bipolar processes. Using a zener trigger circuit and a specific multi-emitter layout technique, this paper successfully demonstrates an optimal protection structure to meet the requirements imposed on advanced submicron circuit applications. The protection circuit has a low trigger voltage as well as a low capacitance load and does not add any series resistance.
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2022-08-23
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